高硬度 (extreme hardness):1800~3000kg / mm
耐腐蝕性佳 (chemical inertness)
表面平滑 (smooth surface):Ra<0.2nm
摩擦係數小 (low friction coefficient):~0.01
電絕緣性佳 (high electrical resistivity)
低表面能(low surface energy)
膜緻密度高 (high density)
熱傳導性佳 (high thermal conductivity)
生物相容性佳 (biocompatibility)
可透 IR 及可見光(transparent in IR and visible range)
能在低溫下成長 (low temperature deposition):<100℃
使用溫度可達250℃
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